|
磁控溅射电源对磁控溅射系统来说也是至关重要的，它的好坏直接影响到成膜质量和系统运行的稳定性。
AJA提供从100瓦到1500瓦的直流和射频电源。主要型号如下：
A500DC 直流500瓦功率
A1000DC 直流1000瓦功率 A1500DC 直流1500瓦功率
A100RF/A100MM
射频100瓦、手动匹配、三路输出
A300RF/A300MM
射频300瓦、手动匹配、三路输出
A300RF/A300MU
射频300瓦、自动匹配(CE)
A500RF/A500MU
射频555瓦、自动匹配(CE)
A600RF/A300MU
射频600瓦、自动匹配(CE)
A1000RF/A1000MU
射频1000瓦、自动匹配(CE)
ASPL-20 20KHz 直流
双极变极器
ASPL-V 可变频直流 双极变极器
典型产品：
AJA 100&300 Watt RF Generator
with manual matching and
integrated 3-way swithchbox
|
SPECIFICATIONS |
A100RF/A100MM |
A300RF/A300MM |
|
|
|
Output Power |
100W |
300W |
|
Frequency |
13.56MHz |
|
Forward Power Metering |
+/-1% full scale, +/-1% reading |
|
Output Power Stability |
+/-0.5% long term, +/-1% Watt |
|
Harmonics |
-55dBc |
|
Input Power |
190-250 VAC,50/60 Hz |
|
Output Connectors |
(3) type “N” female |
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Interface Connectors |
Serial: DB-9 Female, Analog: DB-25 Female |
|
Pulsing |
10kHz, 50 micro sec/min. pulse |
|
Cooling |
Forced Air, 110 cfm (52 l/s) |
|
Dimensions (generator+matchbox) |
(2) half racks, 5.24”high, 19”deep, can be
separate or together |
|
Weight |
43 lbs |
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